Emission Control Adsorbents for the Semiconductor IIndustry
Reliable adsorbents for failproof dry scrubber systems to remove corrosive and toxic gasses in the semiconductor industry.
Rapid growth of the microelectronics industry has spawned new environmental challenges associated with the process utilized to produce semiconductor chips, key components of many sophisticated electronic devices.
Harmful chemicals including silane, phosphine, metal hydrides, arsine and perflourinated compounds (PFCs) are used in the chemical vapor deposition process during semiconductor manufacturing.
Being harmful to human health and suspected global warming gases these gasses are regulated as toxic gasses under the Clean Air Act and other frameworks‚as well as subject to environmental protection policies of mayor players in the semiconductor industry.
Semiconductor manufacturing units prefer reliable and highly efficient dry scrubber technologies based on Süd-Chemie's base metal adsorbents.
Süd-Chemie's adsorption portfolio offers significant opportunity for the semiconductor industry to dramatically reduce the emissions or toxic and corrosive gases by utilization of dry scrubber systems equipped with tailor made chemical adsorption technology.
Reliable chemical adsorption
Room temperature operation
High adsorption capacities
Low adsorbent quantities
Catalyst Types:
EnviCat® N-140 (Tablets, Granules) for CO-removal
EnviCat® N-150 (Tablets, Extrusions) for Hydrides-removal
EnviCat® N-500 (Extrusions) for Aminesremoval
EnviCat® N-600 (Extrusions, Granules) for Halogens-removal
EnviCat® N-620 (Extrusions) for Halogens-removal
State of the art research and development at Süd-Chemie's technology centers ensures timely evolution of today's adsorption portfolio.
Dominant manufacturer are worldwide equipping state of the art dry scrubber systems with Süd-Chemie's adsorption technology, such as Ebara, ATMI or Clean Systems.
