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Adsorbents for Semiconductors

Süd-Chemie

offers cutting-edge technology for the adsorption of toxic and corrosive gasses such as SiH4, AsH3, PH3, HCI, NH3, NF3, and many others encountered in the semicondustor industry.

Equipped in fixed bed adsorber systems (dry scrubber systems), it is the leading choice for the cost-effective protection of our environment.

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Brochures:

Semiconductor exhaust-gas treatment
English-A4 English-US-letter Japanese-A4

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